SPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD and MVD capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.

Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, and MVD. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor and microelectronic device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents. Under agreement with SPP Technologies, Ltd., SPTS also offers APCVD solutions and a range of large batch vertical furnaces.